Hybrid III-V/Si photonic device integration based on template-assisted selective epitaxy

Markus Scherrer

doi:https://doi.org/10.7567/SSDM.2021.H-6-01

15:45 〜 16:15

[H-6-01 (Invited)] Hybrid III-V/Si photonic device integration based on template-assisted selective epitaxy

Markus Scherrer¹、Preksha Tiwari¹、Pengyan Wen¹、Noelia Vico Trivino¹、Svenja Mauthe¹、Marilyne Sousa¹、Heinz Schmid¹、〇Kirsten Moselund¹ (1.IBM Research Europe - Zurich)

https://doi.org/10.7567/SSDM.2021.H-6-01

2021 International Conference on Solid State Devices and Materials

[H-6-01 (Invited)] Hybrid III-V/Si photonic device integration based on template-assisted selective epitaxy