4:43 PM - 4:50 PM

[J-2-06] Vertical Channel Metal-Oxide Semiconductor Gas Sensor to Detect ppb-Level NO₂ at Room Temperature

Ting-Hsuan Huang^1,2, Pei-Yi Li^1,2, Hsin-Fei Meng^1,2, 〇Hsiao Wen Zan^1,2, Ping-Hung Yeh³, Chia-Jung Lu⁴, Olivier Soppera^5,6 (1.National Yang Ming Chiao Tung Univ., 2.National Chiao Tung Univ., 3.Tamkang Univ., 4.National Taiwan Normal Univ., 5.Univ. of Haute-Alsace, 6.Univ. of Strasbourg)

https://doi.org/10.7567/SSDM.2021.J-2-06