A bulk ZnO piezoelectric pressure sensor with an Mg<sub>0.57</sub>Zn<sub>0.43</sub>O thin film deposited by the reactive cosputtering method

16:57 〜 17:04

[J-2-08] A bulk ZnO piezoelectric pressure sensor with an Mg_0.57Zn_0.43O thin film deposited by the reactive cosputtering method

〇Haruyuki Endo¹、Takayuki Nihei¹、Kazuyuki Meguro¹、Kazunori Suzuki¹、Akira Barajima¹、Yasube Kashiwaba² (1.Iwate Indus. Res. Inst.、2.Iwate Univ.)