A bulk ZnO piezoelectric pressure sensor with an Mg<sub>0.57</sub>Zn<sub>0.43</sub>O thin film deposited by the reactive cosputtering method

4:57 PM - 5:04 PM

[J-2-08] A bulk ZnO piezoelectric pressure sensor with an Mg_0.57Zn_0.43O thin film deposited by the reactive cosputtering method

〇Haruyuki Endo¹, Takayuki Nihei¹, Kazuyuki Meguro¹, Kazunori Suzuki¹, Akira Barajima¹, Yasube Kashiwaba² (1.Iwate Indus. Res. Inst., 2.Iwate Univ.)