Characteristics of Millisecond Solid Phase Crystallized Silicon Films Formed by Micro-Thermal-Plasma-Jet and Their Application to Bottom-Gate Thin Film Transistor

11:43 AM - 11:50 AM

[J-4-06] Characteristics of Millisecond Solid Phase Crystallized Silicon Films Formed by Micro-Thermal-Plasma-Jet and Their Application to Bottom-Gate Thin Film Transistor

〇Hoa ThiKhanh Nguyen¹, Hiroaki Hanafusa¹, Ryuji Kawakita¹, Kazuki Segawa¹, Seiichiro Higashi¹ (1.Hiroshima Univ.)