11:43 〜 11:50

[J-4-06] Characteristics of Millisecond Solid Phase Crystallized Silicon Films Formed by Micro-Thermal-Plasma-Jet and Their Application to Bottom-Gate Thin Film Transistor

〇Hoa ThiKhanh Nguyen¹、Hiroaki Hanafusa¹、Ryuji Kawakita¹、Kazuki Segawa¹、Seiichiro Higashi¹ (1.Hiroshima Univ.)

https://doi.org/10.7567/SSDM.2021.J-4-06