11:50 〜 11:57

[J-4-07] Effects of Crystallization Conditions on the Electrical Characteristics of P-type Ge TFTs Formed by Atmospheric Pressure Micro-Thermal-Plasma-Jet Irradiation

〇Takuma SATO¹、Hiroaki HANAFUSA¹、Seiichiro HIGASHI¹ (1.Hiroshima Univ.)

https://doi.org/10.7567/SSDM.2021.J-4-07