Sn Doping Effects on Polycrystalline Germanium Thin-Film Transistors on Glass

Kenta Moto

doi:https://doi.org/10.7567/SSDM.2021.J-4-08

11:57 〜 12:04

[J-4-08] Sn Doping Effects on Polycrystalline Germanium Thin-Film Transistors on Glass

〇Kenta Moto^1,2、Keisuke Yamamoto¹、Toshifumi Imajo^2,3、Takashi Suemasu³、Hiroshi Nakashima¹、Kaoru Toko³ (1.Kyushu Univ.、2.JSPS Research Fellow、3.Univ. of Tsukuba)

https://doi.org/10.7567/SSDM.2021.J-4-08

2021 International Conference on Solid State Devices and Materials

[J-4-08] Sn Doping Effects on Polycrystalline Germanium Thin-Film Transistors on Glass