High-Resolution Tomographic Analysis on AlN films Grown on NPSSs Using Nanobeam X-Ray Diffraction

Yusuke Hayashi, Nozomi Yamamoto, Yudai Nakanishi, Takeaki Hamachi, Tetsuya Tohei, Kazushi Sumitani, Yasuhiko Imai, Shigeru Kimura, Kanako Shojiki, Hideto Miyake, Akira Sakai

doi:https://doi.org/10.7567/SSDM.2021.J-5-03

2:37 PM - 2:44 PM

[J-5-03] High-Resolution Tomographic Analysis on AlN films Grown on NPSSs Using Nanobeam X-Ray Diffraction

〇Yusuke Hayashi¹, Nozomi Yamamoto¹, Yudai Nakanishi¹, Takeaki Hamachi¹, Tetsuya Tohei¹, Kazushi Sumitani², Yasuhiko Imai², Shigeru Kimura², Kanako Shojiki³, Hideto Miyake³, Akira Sakai¹ (1.Osaka Univ., 2.JASRI, 3.Mie Univ.)

https://doi.org/10.7567/SSDM.2021.J-5-03

2021 International Conference on Solid State Devices and Materials

[J-5-03] High-Resolution Tomographic Analysis on AlN films Grown on NPSSs Using Nanobeam X-Ray Diffraction