High-Resolution Tomographic Analysis on AlN films Grown on NPSSs Using Nanobeam X-Ray Diffraction

Yusuke Hayashi

doi:https://doi.org/10.7567/SSDM.2021.J-5-03

14:37 〜 14:44

[J-5-03] High-Resolution Tomographic Analysis on AlN films Grown on NPSSs Using Nanobeam X-Ray Diffraction

〇Yusuke Hayashi¹、Nozomi Yamamoto¹、Yudai Nakanishi¹、Takeaki Hamachi¹、Tetsuya Tohei¹、Kazushi Sumitani²、Yasuhiko Imai²、Shigeru Kimura²、Kanako Shojiki³、Hideto Miyake³、Akira Sakai¹ (1.Osaka Univ.、2.JASRI、3.Mie Univ.)

https://doi.org/10.7567/SSDM.2021.J-5-03

2021 International Conference on Solid State Devices and Materials

[J-5-03] High-Resolution Tomographic Analysis on AlN films Grown on NPSSs Using Nanobeam X-Ray Diffraction