2:44 PM - 2:51 PM

[J-5-04] Study on Negative-Bias Photodegradation Mechanism in IGZO FET with First -Principles Calculation

〇Tomonori Nakayama¹, Masahiro Takahashi¹, Hitoshi Kunitake¹, Kuo-Chang Huang², Hiroshi Yoshida², Miller Liao³, Shou-Zen Chang², Shunpei Yamazaki¹ (1.Semiconductor Energy Laboratory Corp., Ltd, 2.Powerchip Semiconductor Manufacturing Corp., 3.National Taiwan Univ.)

https://doi.org/10.7567/SSDM.2021.J-5-04