14:58 〜 15:05

[J-5-06] Stability of Crystalline IGZO Owing to Minute Crystal Region

〇Tomonori Nakayama¹、Masahiro Takahashi¹、Hitoshi Kunitake¹、Shunpei Yamazaki¹ (1.Semiconductor Energy Laboratory Co., Ltd)

https://doi.org/10.7567/SSDM.2021.J-5-06