Stability of Crystalline IGZO Owing to Minute Crystal Region

2:58 PM - 3:05 PM

[J-5-06] Stability of Crystalline IGZO Owing to Minute Crystal Region

〇Tomonori Nakayama¹, Masahiro Takahashi¹, Hitoshi Kunitake¹, Shunpei Yamazaki¹ (1.Semiconductor Energy Laboratory Co., Ltd)