Transparent ZnO Thin Film Transistors Fully Fabricated by Atomic-Layer-Deposition Process

Junchen Dong, Jingyi Wang, Qi Li, Dengqin Xu, Jingye Xie, Kai Zhao, Dedong Han, Yi Wang, Xing Zhang

doi:https://doi.org/10.7567/SSDM.2021.J-5-08

3:12 PM - 3:19 PM

[J-5-08] Transparent ZnO Thin Film Transistors Fully Fabricated by Atomic-Layer-Deposition Process

Junchen Dong^1,2, Jingyi Wang¹, Qi Li¹, Dengqin Xu¹, 〇Jingye Xie², Kai Zhao², Dedong Han¹, Yi Wang¹, Xing Zhang¹ (1.Peking Univ., 2.Beijing Info. Sci. & Tech. Univ.)

https://doi.org/10.7567/SSDM.2021.J-5-08

2021 International Conference on Solid State Devices and Materials

[J-5-08] Transparent ZnO Thin Film Transistors Fully Fabricated by Atomic-Layer-Deposition Process