4:22 PM - 4:29 PM

[J-6-03] IGZO front-gated TFTs for 3D DRAMs: Process and device advancement

〇Nouredine Rassoul¹, Subhali Subhechha¹, Kaustuv Banerjee¹, Attilio Belmonte¹, Gabriele Donadio¹, Harinarayanan Puliyalil¹, Murat Pak¹, Ming Mao¹, Lieve Teugels¹, Diana Tsvetanova¹, Shreya Kundu¹, Nina Bazzazian¹, Harold Dekkers¹, Michiel van Setten¹, Adrian Chasin¹, Jef Geypen¹, Jeroen Heijlen¹, Davide Crotti¹, Luca Di Piazza¹, Ludovic Goux¹, Romain Delhougne¹, Gouri Sankar Kar¹ (1.IMEC)

https://doi.org/10.7567/SSDM.2021.J-6-03