16:22 〜 16:29

[J-6-03] IGZO front-gated TFTs for 3D DRAMs: Process and device advancement

〇Nouredine Rassoul¹、Subhali Subhechha¹、Kaustuv Banerjee¹、Attilio Belmonte¹、Gabriele Donadio¹、Harinarayanan Puliyalil¹、Murat Pak¹、Ming Mao¹、Lieve Teugels¹、Diana Tsvetanova¹、Shreya Kundu¹、Nina Bazzazian¹、Harold Dekkers¹、Michiel van Setten¹、Adrian Chasin¹、Jef Geypen¹、Jeroen Heijlen¹、Davide Crotti¹、Luca Di Piazza¹、Ludovic Goux¹、Romain Delhougne¹、Gouri Sankar Kar¹ (1.IMEC)

https://doi.org/10.7567/SSDM.2021.J-6-03