4:50 PM - 4:57 PM

[J-6-07] Epitaxial Growth of Indium-Gallium-Oxide-Alloy Thin Films on AlN Templates by Mist Chemical Vapor Deposition

〇Yuri Ogura¹, Yuta Arata¹, Hiroyuki Nishinaka¹, Masahiro Yoshimoto¹ (1.Kyoto Inst. of Tech.)

https://doi.org/10.7567/SSDM.2021.J-6-07