The Japan Society of Applied Physics

3:12 PM - 3:19 PM

[K-1-08] Fabrication of GaN Topological Photonic Crystal Membranes in Visible Wavelength Region by Combination Process of HEATE and Wet Etching

〇Koji Yoneta1, Taiju Kudou1, Akihiko Kikuchi1,2,3 (1.Sophia Univ., 2.Sophia Photonics Research Center, 3.Sophia Semiconductor Research Institute)

https://doi.org/10.7567/SSDM.2021.K-1-08