Fabrication of GaN Topological Photonic Crystal Membranes in Visible Wavelength Region by Combination Process of HEATE and Wet Etching

15:12 〜 15:19

[K-1-08] Fabrication of GaN Topological Photonic Crystal Membranes in Visible Wavelength Region by Combination Process of HEATE and Wet Etching

〇Koji Yoneta¹、Taiju Kudou¹、Akihiko Kikuchi^1,2,3 (1.Sophia Univ.、2.Sophia Photonics Research Center、3.Sophia Semiconductor Research Institute)