Fabrication of GaN Topological Photonic Crystal Membranes in Visible Wavelength Region by Combination Process of HEATE and Wet Etching

3:12 PM - 3:19 PM

[K-1-08] Fabrication of GaN Topological Photonic Crystal Membranes in Visible Wavelength Region by Combination Process of HEATE and Wet Etching

〇Koji Yoneta¹, Taiju Kudou¹, Akihiko Kikuchi^1,2,3 (1.Sophia Univ., 2.Sophia Photonics Research Center, 3.Sophia Semiconductor Research Institute)