2:00 PM - 2:07 PM

[K-5-01] Theoretical Study of H Adsorption on Stepped SiC Surface during CVD Growth

〇Tomoya Kimura¹, Kenta Chokawa², Atsushi Oshiyama², Kenji Shiraishi^2,1 (1.Graduate School of Eng., Nagoya Univ., 2.IMaSS, Nagoya Univ.)

https://doi.org/10.7567/SSDM.2021.K-5-01