Fabrication of deeply undercut GaN micro-disks by selective photo-electrochemical etching of thick InGaN/GaN superlattice

14:21 〜 14:28

[K-5-04] Fabrication of deeply undercut GaN micro-disks by selective photo-electrochemical etching of thick InGaN/GaN superlattice

〇Kenshin Shimoyoshi¹、Shun Ukita¹、Kazuo Uchida¹、Takeyoshi Tajiri¹ (1.Univ. of Electro-Communications)