2:21 PM - 2:28 PM

[K-5-04] Fabrication of deeply undercut GaN micro-disks by selective photo-electrochemical etching of thick InGaN/GaN superlattice

〇Kenshin Shimoyoshi¹, Shun Ukita¹, Kazuo Uchida¹, Takeyoshi Tajiri¹ (1.Univ. of Electro-Communications)

https://doi.org/10.7567/SSDM.2021.K-5-04