14:28 〜 14:35

[K-5-05] Stability and Robustness Evaluation for Poly-Si Resistors with Different Dopant Concentrations

〇Mingte Lin^1,2、Y. C. King² (1.UMC、2.National Tsing Hua Univ. )

https://doi.org/10.7567/SSDM.2021.K-5-05