2:42 PM - 2:49 PM

[K-5-07] Sputtering gas pressure dependence on the LaB_xN_y insulator formation

〇Eun-Ki Hong¹, Shun-ichiro Ohmi¹ (1.Tokyo Inst. of Tech.)

https://doi.org/10.7567/SSDM.2021.K-5-07