The Japan Society of Applied Physics

2022 International Conference on Solid State Devices and Materials

2022 International Conference on Solid State Devices and Materials

Sep 26, 2022 - Dec 23, 2022
Makuhari Messe

2:00 PM - 2:15 PM

[A-9-03] Wide-range Si-based non-contact temperature sensor using single-photon avalanche diodes

〇Yao Lun Liu1, Sheng Di Lin1, Chun Hsien Liu1, Chun Hao Tsai1, Ce Fang Shih1, Jau Yang Wu1, Chia Ming Tsai1 (1. Univ. of National Yang Ming Chiao Tung (Taiwan))

Presentation style: On-site (in-person)

https://doi.org/10.7567/SSDM.2022.A-9-03

A wide-range non-contact temperature sensor using a 64x128 pixels SPAD array with tunable macro-pixel has been demonstrated. The detectable temperature, defined by noise-equivalent temperature difference less than 1℃, from 230 ℃ to 1050 ℃ has been achieved. This work reveals the high potential of SPADs for radiometric temperature measurement.