The SiO2 layer fabricated by the atomic layer dep-osition (ALD) method was applied to control the effi-ciency of the fluorescence quenching of graphene oxide (GO) to supported lipid bilayers (SLBs). Lipid bilayers are the fundamental structure of cell membranes. Lateral and vertical distribution of lipids and proteins in lipid bilayers are essential information to under-stand the membrane reactions on the molecular level. GO is a chemical derivative of graphene and shows a unique fluorescence quenching property. We aim to control the efficiency of GO quenching to SLB.