11:30 〜 11:45

[E-1-01] Reliability Study of Stacked high-k Metal-Insulator-Metal Capacitors

Wei-Hua Chen¹, 〇Gui-Sheng Chao¹, Chrong-Jung Lin¹, Ya-Chin King¹ (1. Univ. of Hsinchu (Taiwan))

Presentation style: Online

https://doi.org/10.7567/SSDM.2022.E-1-01