The Japan Society of Applied Physics

2022 International Conference on Solid State Devices and Materials

2022 International Conference on Solid State Devices and Materials

Sep 26, 2022 - Dec 23, 2022
Makuhari Messe

10:45 AM - 11:00 AM

[E-4-05] 3D monolithic CAAC-IGZO/Si hybrid CMOS ring oscillator and 64 multiple states high efficient (>200TOPS/W) for Analog Memory Computing

〇Min-Cheng Chen1, Satoru Ohshita2, Hidefumi Rikimaru2, Yoshiyuki Kurokawa2, Satoshi Watanabe2, Yuki Imoto2, Yoshinori Ando2, Shang-Shiug Chuang1, Hiroshi Yoshida1, Ming-Han Liao3, Shou-Zen Chang1, Shunpei Yamazaki2 (1. Powerchip Semiconductor Manufacturing Corp. (Taiwan), 2. Semiconductor Energy Laboratory Co., Ltd. (Japan), 3. National Taiwan University (Taiwan))

Presentation style: Online

https://doi.org/10.7567/SSDM.2022.E-4-05

We present a CAAC-IGZO/Si hybrid CMOS technology with monolithic 3D stacked high stability MIM/OS-FET in Si BEOL process. The insert OS-LSI process shows no impact on Si FEOL characteristic performance. A 51-stages CAAC-IGZO/Si hybrid CMOS ring oscillator capable of reducing 20% layout area has been successfully demonstrated. On the other hand, the CAAC-IGZO/Si Analog in-Memory Computing (AiMC) chip also achieves a multiple weighting states of 64, an operation efficiency of more than 200TOPS/W, and an inference accuracy larger than 90% (MNIST). We believe it is suitable for applications of decrypt encryption and/or IoT sensors.