The Japan Society of Applied Physics

2022 International Conference on Solid State Devices and Materials

2022 International Conference on Solid State Devices and Materials

Sep 26, 2022 - Dec 23, 2022
Makuhari Messe

2:30 PM - 2:45 PM

[E-6-04] A Novel Poly-Si/IGZO Thin-Film Transistor Process Platform for Sensor Applications

〇Ping-Che Liu1, Jen-Chi Liao1, Chun-Jung Su2, Pei-Wen Li1, Horng-Chih Lin1 (1. Inst. of Electronics, National Yang Ming Chiao Tung Univ. (Taiwan), 2. Department of Electrophysics, National Yang Ming Chiao Tung Univ. (Taiwan))

Presentation style: Online

https://doi.org/10.7567/SSDM.2022.E-6-04

We presented a novel three-mask scheme for fabricating a sensing cell consisting of a top-gated poly-Si thin-film transistor (TFT) and a bottom-gated IGZO TFT. The hybrid TFT sensing cell exhibits sharp transition with a high current ratio (≈ 1×10^5) between two switching levels.