16:15 〜 16:30
[A-2-02] Thermal-aware Design of Metal Nanosheet Sensors for Low-energy, Highly Sensitive Hydrogen Sulfide Nanoscale Sensors
Metal nanosheet gas sensors have attracted attention because of their high selectivity and low-energy operation using self-Joule-heating effects. However, the self-Joule-heated sensors have showed lower sensor responses than those heated by external heaters. In this study, we investigated the relationship between the experimental sensor responses and the temperatures simulated by the finite-element method. We showed that the large temperature drops at the edges of the short-channel Au nanosheet cause the lower responses. However, by introducing Pt as the electrode material, the low-energy and highly sensitive Au nanosheet H2S sensor was achieved, thanks to the lower thermal conductivity of Pt. This thermal-aware design will be useful for realizing low-energy gas sensors.