The Japan Society of Applied Physics

2023 International Conference on Solid State Devices and Materials

2023 International Conference on Solid State Devices and Materials

Sep 5, 2023 - Oct 31, 2023
Nagoya Congress Center

11:30 AM - 11:45 AM

[D-4-03] High-sensitivity, low-power FET-type NO 2 gas sensor using electron concentration control of gas-sensing material

○Gyuweon Jung1, Kangwook Choi1, Wonjun Shin1, Jinwoo Park1, Donghee Kim1, Jaehyeon Kim1, Hunhee Shin1, Chayoung Lee1, Woo Young Choi1, Jong-Ho Lee1 (1. Seoul National Univ. (Korea))

https://doi.org/10.7567/SSDM.2023.D-4-03

A high-sensitivity and low-power FET-type gas sensor is proposed. The proposed sensor increases the amount of adsorbed NO2 gas molecules and decreases the NO2 gas adsorption energy by controlling the electron concentration of the sensing material. The electron concentration control method increases the NO2 gas adsorption-induced threshold voltage change (ΔVth) by a factor of ~2.3. Due to the exceptionally high sensitivity of the sensor at low temperatures (100 ℃), the sensor can detect NO2 gas with very little power (~1.55 mW).