The Japan Society of Applied Physics

2023 International Conference on Solid State Devices and Materials

2023 International Conference on Solid State Devices and Materials

Sep 5, 2023 - Oct 31, 2023
Nagoya Congress Center

9:30 AM - 9:45 AM

[D-5-03] Multiple Gases Sensing Ability Based on Spiral-Shape Chip

○Wan Lin Lee1, Huang Ming Philip Chen1, Hsi Teng Kao2 (1. National Yang Ming Chiao Tung University (Taiwan), 2. SUNPLUS TECHNOLOGY CO., LTD. (Taiwan))

https://doi.org/10.7567/SSDM.2023.D-5-03

Our results suggested that surface modified spiral-ship gas sensor chip with iron(II) phthalocyanine (FePc), copper hexadecafluorophthalocyanine (F16CuPc), and copper(II) phthalocyanine (CuPc) were able to detect volatile organic compounds (VOCs) at very low concentration of nitric oxide (NO), ammonia (NH3), and acetone (CH3COCH3) separately. In addition, the signal pattern calculated from different sensing devices at the same testing condition allows us to distinguish the pure or mixture gases.