The Japan Society of Applied Physics

11:45 AM - 12:00 PM

[E-4-04] Optimization of Cell to Cell Space Material on 3D NAND Flash Memory

Daewoong Kang1, Inyoung Lee2, Yunjae Oh2, Yunjae Suh3, Il Hwan Cho2 (1. Seoul National University (Korea), 2. Myongji Univ. (Korea), 3. Soongsil Univ. (Korea))

https://doi.org/10.7567/SSDM.2023.E-4-04

In 3D NAND flash memory, the influence of adjacent cells was analyzed for the first time considering even retention. Since the charge trap layer is connected between cells, cell current and interference have window characteristics. Optimal performance can be obtained at dielectric constant 3-5 of space dielectric material, and additional performance improvement can be obtained through high-k/low-k/high-k multi-dielectric structure.