The Japan Society of Applied Physics

2023 International Conference on Solid State Devices and Materials

2023 International Conference on Solid State Devices and Materials

2023年9月5日 〜 2023年10月31日
Nagoya Congress Center

11:00 〜 11:15

[E-6-02] Development of a Low-Powered, Ultra-Sensitive, Room-Temperature-Operated SnO 2-Based NOx Gas Sensor Using Sol-Gel Technique

○Moumita Deb1, Ngoc Khanh Tran Ho2, Hsin Fei Meng2, Olivier Soppera3, Hsiao Wen Zan1 (1. Department of Photonics, College of Electrical and Computer Engineering, National Yang Ming Chiao Tung Univ. (Taiwan), 2. Institute of Physics, National Yang Ming Chiao Tung Univ. (Taiwan), 3. Université de Haute-Alsace, CNRS, IS2M (France))

https://doi.org/10.7567/SSDM.2023.E-6-02

We have demonstrated an ultrasensitive gas sensor based on SnO2 that can detect NOx (NO+NO2) with low detection limits of 5 ppb for NO and 20 ppb for NO2, at an operating voltage as low as 0.5V and at room temperature. The SnO2-based thin film was prepared using sol-gel processes and annealed at 450ºC/2h. The proposed sensor can detect NO gas within the range of 5 to 500 ppb with responses of 1.1% and 65.1% for the lowest and highest gas concentrations, respectively, within the linear dynamic range. Additionally, the NO2 gas responses are 0.5% and 18.1% at 20 and 500 ppb, respectively. Finally, we have demonstrated the self-power performance of the SnO2-based NOx gas sensor by integrating it with an organic photovoltaic device (OPV).