The Japan Society of Applied Physics

2023 International Conference on Solid State Devices and Materials

2023 International Conference on Solid State Devices and Materials

Sep 5, 2023 - Oct 31, 2023
Nagoya Congress Center

11:15 AM - 11:30 AM

[E-6-03] Selenized 2D Film Based Gas Sensor with Self-Convergent Calibration

Che-Chuan Liu1, ○Hsin-Yi Shen1, Kuangye Wang2, Yu-Lun Chueh2, Yue-Der Chih3, Jonathen Chang3, Jiaw-Ren Shih1, Chrong-Jung Lin1, Ya-Chin King1 (1. Microelectronics Laboratory, Institute of Electronics Engineering, National Tsing Hua Univ. (Taiwan), 2. Department of Materials Science and Engineering, National Tsing Hua Univ. (Taiwan), 3. Design and Technology Platform, Taiwan Semiconductor Manufacturing Company (tsmc) (Taiwan))

https://doi.org/10.7567/SSDM.2023.E-6-03

A selenized 2D-film based gas sensor combined with metal-gate-coupled floating gate devices for realizing self-convergent calibration is proposed in this work. The resistance levels of 2D gas-sensing material may vary widely from device-to-device, leading to large shifts on the output signals of the sensing circuit. Through a self-convergent operation, the variation effects can be effectively minimized for more precise sensing results.