The Japan Society of Applied Physics

14:30 〜 14:45

[E-7-03] Low Ni Accumulation Symmetric S/D Vertical n-Channel Poly-Si Thin-Film Transistors Fabricated Using Dual Offset Ni Seeding Windows and Discrete Ni Formation Technology

Po-Yi Kuo1, Ching-Long Huang2, Guan-Lin Guo2, Hao-Yu Wang2, Yu-Cheng Chou2, Yu-Ming Chiu2, Zhen-Jie Hong2 (1. National Chin Yi Univ. of Tech. (Taiwan), 2. Feng Chia Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2023.E-7-03

We have successfully developed and fabricated low Ni accumulation symmetric S/D vertical n-channel poly-Si thin-film transistors (LNA-SVTFTs) using dual offset Ni seeding windows and discrete Ni formation technology. The proposed LNA- SVTFTs are S/D symmetric devices and equivalent to dual-gate devices. Therefore, the Ni accumulation induced from dual Ni seeding windows can be centralized in the n+ floating region. The location effects of Ni seeding windows and the channel width effects of poly-Si crystal filtering structure in LNA-SVTFTs are studied. We also develop a novel discrete Ni formation technology to minimize Ni accumulation, which enhances grain size and carrier mobility.