The Japan Society of Applied Physics

14:15 〜 14:30

[F-1-02] Sub-20nm gate length p-FinFETs device performance improvement using TEM/EDX and NBD based TCAD calibrations.

Pierre EYBEN1, Pierre De Keersgieter1, Philippe Matagne1, Thomas Chiarella1, Clément Porret1, Andriy Hikavyy1, Yong Kong Siew1, Ludovic Goux1, Jérôme Mitard1, Naoto Horiguchi1 (1. Imec (Belgium))

https://doi.org/10.7567/SSDM.2023.F-1-02

In this paper we analyze how an improved SiGe p-epi source/drain engineering can enhance the performance of sub-20nm gate length p-FinFETs. In the proposed approach, Drift-Diffusion TCAD simulations are calibrated based on advanced metrology and on Monte-Carlo simulations such that the resulting simulated ID-VG matches the one measured on device. Calibrated TCAD simulator is then used to understand the limited performances of the device and to propose new source/drain epi architectures with graded and increased Ge content. A new p-FinFET design is fabricated and tested, confirming a boost in ON-current and a reduction of the access resistance. Prospective TCAD work is also performed to suggest possible future improvements.