The Japan Society of Applied Physics

15:30 〜 15:45

[F-1-07 (Late News)] Relationship between Electron Velocity Overshoot and Quantum Confinement in Si Nanosheet Gate-All-Around Field-Effect Transistors

Junichi Hattori1, Koichi Fukuda1, Tsutomu Ikegami1, Yoshihiro Hayashi1 (1. AIST (Japan))

https://doi.org/10.7567/SSDM.2023.F-1-07

We simulate the static behavior of Si nanosheet gate-all-around field-effect transistors and investigate the relationship between the effects of electron velocity overshoot on it and those of quantum confinement. Electron velocity overshoot leads to an increase in drain current, which is enhanced by quantum confinement. This enhancement increases with decreasing gate length and shows a more complex dependence on the nanosheet thickness.