This paper proposes a serpentine spring design technique considering the edge span beam length L/2 and the key structure parameters influenced by the fabrication process for MEMS device. The Fedder model is suitable for the spring constant characteristics of finite element analysis with the edge span beam L/2. Further, the thickness t and width w are found to be dominant parameters of the serpentine spring constant k. The variation between the measured data kz of 4.46 N/m and the design value k0 of 4.15 N/m was 7.5%, satisfying the target of ±10%. This study confirms that the proposed technique can establish the serpentine spring for high sensitivity gold proof-mass MEMS accelerometers.