The Japan Society of Applied Physics

2023 International Conference on Solid State Devices and Materials

2023 International Conference on Solid State Devices and Materials

Sep 5, 2023 - Oct 31, 2023
Nagoya Congress Center

10:45 AM - 11:15 AM

[G-6-01 (Invited)] The evolution towards CMOS 2.0, a Heterogeneous Logic Platform

○Geert Hellings1, Sheng Yang1, Pieter Weckx1, Marie Garcia Bardon1, Maarten Van de Put1, Julien Ryckaert1 (1. imec (Belgium))

https://doi.org/10.7567/SSDM.2023.G-6-01

This paper discusses the evolution towards CMOS 2.0, a fully heterogeneous logic platform, integrating functional backside technology, Array-under-CMOS and Active Interposer.