3:30 PM - 3:45 PM
[K-8-01] A Machine Learning Based System Exploring the Correlation between Process Parameters and Device Characteristics in a 3D NAND Flash Memory Technology
As NAND flash memory technologies evolve-, the complexity of processes increases dramatically. With limited resources, it is challenging to quickly analyze and find the optimal process because a single problem often requires multiple processes to solve. This paper demonstrates how to use machine learning to assist simulating and analyzing device characteristics with given process parameters. By setting up the target characteristics, the proposed system can effectively recommend process parameters and accelerate the search for the optimal process solution.