The Japan Society of Applied Physics

10:15 AM - 10:30 AM

[M-3-05 (Late News)] Optical Material Properties of Epitaxial SiGe/Si Multi-Layers Used for Complementary FET Devices

Roger Loo1, Andriy Hikavyy1, Dong Wang2, Keisuke Yamamoto2, Tamás Sipőcz33, Árpád Kerekes3, Anjani Akula1, Yosuke Shimura1 (1. Imec (Belgium), 2. Kyushu Univ (Japan), 3. Semilab Semiconductor Physics Lab. Corp. (Hungary))

https://doi.org/10.7567/SSDM.2023.M-3-05

This work describes the optical material properties of SiGe/Si multi-layers that are epitaxially grown to define the channel material of CFET devices. Two sets of epitaxial growth conditions are compared. The absence/presence of lattice defects is verified by room temperature photoluminescence measurements. Photoluminescence measurements at low temperatures are used to study band-to-band luminescence from individual sub-layers and to demonstrate the absence of non-radiative recombination center in the CFET stack.