The Japan Society of Applied Physics

17:15 〜 17:30

[N-2-05 (Late News)] Atomic and Electronic Structures of Basal Plane Dislocations (BPDs) in 4H-SiC -Atomistic Origin of Bipolar Degradation of SiC Devices-

Masaki Sano1, Jun Kojima2, Shoichi Onda2, Takashi Yoda3, Takayuki Ohba3, Kenji Shiraishi1,2 (1. Graduate School of Engineering, Nagoya University (Japan), 2. Institute of Materials and Systems for Sustainability (Japan), 3. WOW Alliance, Tokyo Institute of Technology (Japan))

https://doi.org/10.7567/SSDM.2023.N-2-05

Basal plane dislocations (BPDs) which consist of a pair of patrial dislocations (PDs) with Shockley-type stacking faults (SFs) between them are suspected to cause the forward voltage degradation (bipolar deg-radation), thus leading to the degradation of SiC-based electron devices. However, microscopic reason for the forward voltage degradation has not been fully under-stood yet. In this study, we theoretically studied the atomic and electronic structures of BPDs by using first principal calculations based on the density-functional theory (DFT) and clarified the atomistic origin of for-ward voltage degradation of SiC devices. We have found that generated stacking-faults induce gap states near conduction band bottom. Moreover, the pair of PDs also cause gap states. These gap states are the atomistic origin of the degradation of the SiC-based electron devices.