The Japan Society of Applied Physics

2023 International Conference on Solid State Devices and Materials

2023 International Conference on Solid State Devices and Materials

2023年9月5日 〜 2023年10月31日
Nagoya Congress Center

11:00 〜 11:15

[N-4-02] Restoration of Degraded Reverse Bias Safety Operating Area (RBSOA) in 3300V Scaled IGBTs by Non-Proportional Scaling Method

○Xiang Zhou1, Munetoshi Fukui1, Kiyoshi Takeuchi1, Takuya Saraya1, Wataru Saito2, Toshiro Hiramoto1 (1. The Univ. of Tokyo (Japan), 2. Kyushu Univ. (Japan))

https://doi.org/10.7567/SSDM.2023.N-4-02

Robustness under high temperature clamped inductive turn-off has been compared systematically among 3300V scaled IGBTs with scaling factor (k) from 1 to 10 by TCAD simulations. Degradation of Reverse Bias Safety Operating Area (RBSOA) has been observed in scaled IGBT, especially at high turn-off current density. Non-proportional scaling method has been proven to be able to restore the robustness degradation.