The Japan Society of Applied Physics

[PS-1-05] Effective Detection of Micro-Potential Analytes with Self-Sensitivity Programmable pH Sensor Platform Based on a Multi-Functional Charge-Trap-Flash-Type Ion-Sensitive-Field-Effect-Transistor

Yeong-Ung Kim1, Won-Ju Cho1 (1. Kwangwoon Univ. (Korea))

https://doi.org/10.7567/SSDM.2023.PS-1-05

This work proposes a charge-trap-flash (CTF) type ion-sensitive-field-effect transistor (ISFET) as a high-performance pH sensor platform with high sensitiv-ity. The proposed platform overcomes the low sensitivity problem (~59 mV/pH) of conventional ISFETs by utiliz-ing the resistance coupling effect via channel resistance modulation. CTF-type ISFET enables accurate pH detec-tion and high sensitivity, which was demonstrated through excellent signal amplification and sensitivity control. The proposed pH sensor platform is expected to be widely used in next-generation biosensors for micro-potential analytes detection.