The Japan Society of Applied Physics

[PS-1-13] Vertical Gate-All-Around SiGeSn/GeSn/SiGeSn Nanowire nFETs

Yannik Junk1, Omar Concepción Diaz1, Marvin Frauenrath2,3, Florian Bärwolf4, Andreas Mai4, Jean-Michel Hartmann2,3, Detlev Grützmacher1, Dan Buca1, Qing-Tai Zhao1 (1. Peter-Grünberg-Institut (PGI-9) and JARA-FIT, Forschungszentrum Jülich (Germany), 2. CEA-LETI, MINATEC Campus, F-38054 Grenoble (France), 3. Univ. of Grenoble Alps (France), 4. IHP-Leibniz-Institut für innovative Mikroelektronik, 15236 Frankfurt (Oder) (Germany))

https://doi.org/10.7567/SSDM.2023.PS-1-13

SiGeSn is a new ternary alloy that allows for band gap tuning over a large energy range as well as band offset engineering with GeSn. Here the first vertical gate-all-around nanowire nFETs featuring a SiGeSn/GeSn/SiGeSn heterostructure are presented. The devices show a subthreshold swing (SS) of 71 mV/dec and a low off-current attributed to the expected larger bandgap and therefore suppressed gate induced drain leakage (GIDL). The results demonstrate that SiGeSn is an exciting alloy that extends the pure Ge and GeSn material properties.