The Japan Society of Applied Physics

2023 International Conference on Solid State Devices and Materials

2023 International Conference on Solid State Devices and Materials

Sep 5, 2023 - Oct 31, 2023
Nagoya Congress Center

[PS-11-01] Three-dimensional structure of threading screw dislocation at deep location in 4H-SiC using step-scanning X-ray section topography

○Kotaro Ishiji1, Akio Yoneyama1,2, Masayuki Inaba3, Kazunori Fukuda4, Atsushi Sakaki5, Shinya Ohmagari6, Ryuichi Sugie7 (1. Kyushu Synchro. Light Res. Center (Japan), 2. Res. Dev. Group, Hitachi, Ltd. (Japan), 3. Nissan ARC, Ltd. (Japan), 4. Kobelco Res. Inst., Inc. (Japan), 5. Nichia Corp. (Japan), 6. National Inst. Adv. Indus. Sci. Tech. (Japan), 7. Toray Res. Center, Inc. (Japan))

https://doi.org/10.7567/SSDM.2023.PS-11-01

A step-scanning X-ray section topography (SSXST) was used to construct three-dimensional structure of threading screw dislocation (TSD) at a deep location in 4H-SiC. The three-dimensional strain field of the TSD core-line propagating inside the sample was observed. Not only TSDs parallel to the <0001> axis but also TSDs inclined from the <0001> axis were clearly captured. The inclined TSD has the potential to include the mixed component of either <-1-120> or <-1100> in addition to a base component of <0001> of the Burgers vector.