The Japan Society of Applied Physics

[PS-11-08] Epitaxial Temperature Effect on the Band Alignment of MoS2/GaN Heterojunction Measured by X-ray Photoelectron Spectroscopy

Ray-Yu Hong1, Ing-Song Yu1, Ping-Yu Tsai2, Po-Hung Wu3 (1. National Dong Hwa Univ. (Taiwan), 2. National Chung-Shan Inst. of Sci. & Tech. (Taiwan), 3. Stone & Resource Industry R&D Center (Taiwan))

https://doi.org/10.7567/SSDM.2023.PS-11-08

Molybdenum disulfide (MoS2) is a two-dimensional (2D) semiconductor bonded to each other with weak van der Waals forces, and gallium nitride (GaN) is a promising wide-bandgap compound semiconductor. In this report, GaN thin films were grown on 2D MoS2 by plasma-assisted molecular beam epitaxy at different substrate temperatures (500, 600 and 700 oC) to fabricate MoS2/GaN heterojunction. The energy band diagrams of MoS2/GaN heterojunction grown at different temperatures were analyzed by X-ray photoelectron spectroscopy. The straddling relation, type-I, between narrow-bandgap MoS2 and wide-bandgap GaN can be observed at the optimized growth condition.