The Japan Society of Applied Physics

[PS-2-16] Improved Response to NO Gas Observed in HfO2-based Gasistor Devices due to CNTs-Top Electrode and en-APTAS Membrane

Myoungsu Chae1, Doowon Lee1, Hee-Dong Kim1 (1. Univ. of Sejong (Korea))

https://doi.org/10.7567/SSDM.2023.PS-2-16

Memristor-based gas sensor (Gasistor) has physical limitations because the target gas is detected through the top electrode (TE). In this paper, we used CNTs with a porous structure as the TE to address this limitation. Furthermore, by decorating CNTs-TE with N-[3-(Trimethoxysilyl)propyl] ethylenediamine (en-APTAS), the functional groups interacted with the target gas to increase the probability of adsorption and improve the response. As a result, the proposed gasistor with CNTs-TE decorated with 1.5 wt% of en-APTAS exhibits a high response of 47 at 50 ppm, which is five times higher than that of a gasistor with a conventional metal TE.